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A dedicated calibration standard for nanoscale areal surface texturemeasurements

Koops, R (VSL), van Veghel, M (VSL) and van de Nes, A (VSL)
Keywords:

Traceability Calibration standard Areal surface texture Sq Measurement uncertainty

Document typeArticle
Journal title / SourceMicroelectronic Engineering
Peer-reviewed articleYes
Volume141
Issue2015
Page numbers / Article number250-255
Publisher's nameElsevier
Publication date 2015
DOI10.1016/j.mee.2015.04.021
LanguageEnglish

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