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Comprehensive Comparison of Various Techniques for the Analysis of Elemental Distributions in Thin Films: Additional Techniques

Abou-Ras, DAR (Helmholtz-Zentrum Berlin für Materialien und Energie GmbH, Hahn-Meitner-Platz 1, 14109 Berlin, Germany), Caballero, RC ( Helmholtz-Zentrum Berlin für Materialien und Energie GmbH, Hahn-Meitner-Platz 1, 14109 Berlin, Germany), Streeck, CS (Physikalisch-Technische Bundesanstalt, Abbestr. 2-12, 10587 Berlin, Germany), Beckhoff, BB (Physikalisch-Technische Bundesanstalt, Abbestr. 2-12, 10587 Berlin, Germany), In, JHI (School of Mechatronics, Gwangju Institute of Science and Technology, 1 Oryong-dong, Buk-gu, Gwangju 500-712, Republic of Korea) and Jeong, SJ (School of Mechatronics, Gwangju Institute of Science and Technology, 1 Oryong-dong, Buk-gu, Gwangju 500-712, Republic of Korea)
Keywords:

elemental distributions, thin films, laser-induced breakdown spectroscopy, grazing-incidence X-ray fluorescence analysis, comparison

Document typeArticle
Journal title / SourceMicroscopy and Microanalysis
Peer-reviewed articleYes
Volume21
Issue6
Page numbers / Article number1644-1648
Publisher's nameCambridge University Press (CUP)
Publication date 2015-09-14
ISSN1431-9276
DOI10.1017/S1431927615015093
Web URLhttp://journals.cambridge.org/action/displayAbstract?fromPage=online&aid=10063275&fulltextType=RA&fileId=S1431927615015093
LanguageEnglish

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