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Modeling of line roughness and its impact on the diffraction intensities and the reconstructed critical dimensions in scatterometry

Gross, H. (Physikalisch-Technische Bundesanstalt, Braunschweig & Berlin, Bundesallee 100, D-38116, Braunschweig, Germany), Henn, M.-A. (Physikalisch-Technische Bundesanstalt, Braunschweig & Berlin, Bundesallee 100, D-38116, Braunschweig, Germany), Heidenreich, S. (Physikalisch-Technische Bundesanstalt, Braunschweig & Berlin, Bundesallee 100, D-38116, Braunschweig, Germany), Rathsfeld, A. (Physikalisch-Technische Bundesanstalt, Braunschweig & Berlin, Bundesallee 100, D-38116, Braunschweig, Germany) and Bär, M. (Physikalisch-Technische Bundesanstalt, Braunschweig & Berlin, Bundesallee 100, D-38116, Braunschweig, Germany)
Document typeArticle
Journal title / SourceAPPLIED OPTICS
Volume51
Issue30
Page numbers / Article number7384 - 7394
Publication date 2012-10-18
DOI10.1364/AO.51.007384
LanguageEnglish

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