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Performance verification of a dual sensor stage

Yacoot, A. (NPL, Teddington, UK), Mountford, J. (NPL, Teddington, UK), Tedaldi, M. (NPL, Teddington, UK), Reid, B. (Queensgate Instruments, Torquay, UK) and Levy, S. (Queensgate Instruments, Torquay, UK)
Keywords:

nanopositioning, nanometrology, optical interferometry

Document typeProceeding
Journal title / SourceProceedings of the 14th euspen International Conference – Dubrovnik – June 2014
Peer-reviewed articleYes
VolumeI
Page numbers / Article numberP4.38, 309V1
Publisher's nameEUSPEN
Publisher's address (city only)Bedford
Publication date 2014
Conference name14th international conference of the european society for precision engineering and nanotechnology
Conference dateJune 2-6, 2014
Conference placeDubrovnik, Croatia
ISBN978-0-9566790-3-1
Web URLhttp://www.euspen.eu/Portals/0/Content/2000-2013/Resources/Proceedings/2014%20Dubrovnik%20Contents%20Pages.pdf
LanguageEnglish

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