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The EURAMET Repository Link is an online service providing links to scientific papers published within the European Metrology Research Programme (EMRP), the European Metrology Programme for Innovation and Research (EMPIR) and projects funded by iMERA-Plus.

The statistical inverse problem of scatterometry: Bayesian inference and the effect of different priors

Heidenreich, S (PTB), Gross, H (PTB), Wurm, M (PTB), Bodermann, B (PTB) and Bär, M (PTB)
Keywords:

Uncertainty quantification, Diffraction gratings, Hybrid metrology

Document typeProceeding
Journal title / SourceProc. SPIE 9526, Modeling Aspects in Optical Metrology V, 95260U (June 21, 2015)
Peer-reviewed articleYes
Volume9526
IssueModeling Aspects in Optical Metrology V
Page numbers / Article number-
Publisher's nameSociety of Photo-Optical Instrumentation Engineers (SPIE)
Publisher's address (city only)Munich
Publication date 2015-06-21
Conference nameSPIE Modeling Aspects in Optical Metrology V
Conference date21-06-2015
Conference placeMunich
ISSN-
DOI10.1117/12.2185707
ISBN-
Web URLhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2344591
LanguageEnglish

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