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High-accuracy absolute distance measurement with a mode-resolved optical frequency comb

Voigt, D. (VSL, Delft, The Netherlands), van den Berg, S.A. (VSL, Delft, The Netherlands), Lešundák, A. (Institute of Scientific Instruments of the ASCR, Brno, Czech Republic), van Eldik, S. (MAPPER Lithography, Delft, The Netherlands) and Bhattacharya, N. (Delft University of Technology)
Keywords:

Distance measurement, frequency combs, homodyne detection, intererometry

Document typeProceeding
Journal title / SourceProceedings of SPIE
Volume9899
Page numbers / Article number989906
Publisher's nameSPIE
Publisher's address (city only)Bellingham
Publication date 2016-04-29
Conference nameSPIE Photonics Europe 2016, Optical Sensing and Detection IV
Conference date04-04-2016 to 07-04-2016
Conference placeBrussels, Belgium
ISSN1996-756X
DOI10.1117/12.2227360
LanguageEnglish

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