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Practical Fabry-Perot displacement interferometry in ambient air conditions with subnanometer accuracy

Voigt, D. (VSL, Delft, The Netherlands), van de Nes, A.S. (VSL, Delft, The Netherlands) and van den Berg, S.A. (VSL, Delft, The Netherlands)
Keywords:

Fabry-Perot interferometers, interferometry, nanotechnology, calibration, sensors, engineering, refractive index

Document typeProceeding
Journal title / SourceProceedings of SPIE
Volume9203
Page numbers / Article number920308
Publisher's nameSPIE
Publisher's address (city only)Bellingham
Publication date 2014-08-18
Conference nameSPIE Optics & Photonics Congress, Interferometry XVII: Techniques and Analysis
Conference date17-08-2014 to 21-08-2014
Conference placeSan Diego, CA, USA
ISSN1996-756X
DOI10.1117/12.2060537
LanguageEnglish

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