Practical Fabry-Perot displacement interferometry in ambient air conditions with subnanometer accuracy
Voigt, D. (VSL, Delft, The Netherlands), van de Nes, A.S. (VSL, Delft, The Netherlands) and van den Berg, S.A. (VSL, Delft, The Netherlands)Fabry-Perot interferometers, interferometry, nanotechnology, calibration, sensors, engineering, refractive index
| Document type | Proceeding |
| Journal title / Source | Proceedings of SPIE |
| Volume | 9203 |
| Page numbers / Article number | 920308 |
| Publisher's name | SPIE |
| Publisher's address (city only) | Bellingham |
| Publication date | 2014-08-18 |
| Conference name | SPIE Optics & Photonics Congress, Interferometry XVII: Techniques and Analysis |
| Conference date | 17-08-2014 to 21-08-2014 |
| Conference place | San Diego, CA, USA |
| ISSN | 1996-756X |
| DOI | 10.1117/12.2060537 |
| Language | English |