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Direct structural characterisation of line gratings with grazing incidence small-angle x-ray scattering

Wernecke, Jan (Physikalisch-Technische Bundesanstalt, Braunschweig & Berlin, Bundesallee 100, D-38116, Braunschweig, Germany), Scholze, Frank (Physikalisch-Technische Bundesanstalt, Braunschweig & Berlin, Bundesallee 100, D-38116, Braunschweig, Germany) and Krumrey, Michael (Physikalisch-Technische Bundesanstalt, Braunschweig & Berlin, Bundesallee 100, D-38116, Braunschweig, Germany)
Document typeArticle
Journal title / SourceREVIEW OF SCIENTIFIC INSTRUMENTS
Peer-reviewed articleYes
Volume83
Publication date 2012-10-17
DOI10.1063/1.4758283
Web URLhttp://scitation.aip.org/content/aip/journal/rsi/83/10?ver=pdfcov
LanguageEnglish

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