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Traceability of mass II: a study of procedures and materials

Marti, Kilian (Federal Institute of Metrology METAS), Fuchs, Peter (Comet ebeam Technologies) and Russi, Stefan (Federal Institute of Metrology METAS)
Keywords:

Mass, XPS, traceability, recontamination, hydrogen plasma, UV/ozone, air-vacuum transfer

Document typeArticle
Journal title / SourceMetrologia
Peer-reviewed articleYes
Volume52
Issue1
Page numbers / Article number89-103
Publisher's nameIOP Publishing
Publisher's address (city only)Bristol
Publication date 2015-01-7
ISSN0026-1394
DOI10.1088/0026-1394/52/1/89
Web URLhttp://iopscience.iop.org/article/10.1088/0026-1394/52/1/89
LanguageEnglish

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