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The EURAMET Repository Link is an online service providing links to scientific papers published within the European Metrology Research Programme (EMRP), the European Metrology Programme for Innovation and Research (EMPIR) and projects funded by iMERA-Plus.

An upgraded data acquisition and drive system at the Nanometer

Köchert, P. (PTB), Köning, R. (PTB), Weichert, C. (PTB), Flügge, J. (PTB) and Manske, E. (TU Ilmenau)
Keywords:

interferometer

Document typeProceeding
Journal title / SourceASPE Proceedings
Page numbers / Article number61-66
Publisher's nameAmerican Society for Precision Engineering
Publisher's address (city only)Raleigh
Publication date 2015
Conference nameASPE Summer Topical Meeting, Precision Interferometric Metrolofy
Conference dateJuly 8-10, 2015
Conference placeColorado, USA
ISBN978-1-887706-68-1
Web URLhttp://aspe.net/technical-meetings/past-aspe-meetings/aspe-summer-2015/
LanguageEnglish

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