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Analytical modeling and three-dimensional finite element simulation of line edge roughness in scatterometry

Kato, A. (Hochschule Ruhr West—University of Applied Sciences, Dümptener Straße 45, 45476 Mülheim an der Ruhr, Germany), Burger, S. (JCMwave GmbH, Bolivarallee 22, D-14050 Berlin, Germany) and Scholze, F. (Physikalisch-Technische Bundesanstalt, Braunschweig & Berlin, Bundesallee 100, D-38116, Braunschweig, Germany)
Document typeArticle
Journal title / SourceAPPLIED OPTICS
Volume51
Issue27
Page numbers / Article number6457 - 6464
Publication date 2012-09-11
DOI10.1364/AO.51.006457
LanguageEnglish

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