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Effects of thermal drifts on the calibration of capacitive displacement probes at the nanometer level of accuracy

Bouderbala, K (LNE), Nouira, H (LNE), Girault, M (ENSMA), Videcoq, E (ENSMA) and Salgado, J (LNE)
Keywords:

thermal behavior and drift, capacitive displacement probe, dimensional metrology, evaluation

Document typeArticle
Journal title / SourceInstrumentation and Measurement, IEEE Transactions
VolumePP
Issue99
Page numbers / Article number1
Publisher's nameIEEE
Publication date 2015-06-26
ISSN0018-9456
DOI10.1109/TIM.2015.2440563
LanguageEnglish

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