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Sputtering Yields for Gold Using Argon Gas Cluster Ion Beams

Yang, L. (Analytical Science Division, National Physical Laboratory, Teddington TW11 0LW, UK), Seah, M.P. (National Physical Laboratory, Teddington, Middlesex TW11 0LW, UK) and Gilmore, I.S. (National Physical Laboratory, Teddington, Middlesex TW11 0LW, UK)
Keywords:

Air cluster; GCIB; Gold; Sputtering yield

Document typeArticle
Journal title / SourceThe journal of Physical Chemistry
Peer-reviewed articleYes
Volume116
Issue44
Page numbers / Article number23735 – 23741
Publisher's nameACS
Publisher's address (city only)Washington DC
Publication date 2012-10-11
ISSN1932-7447
DOI10.1021/jp307203f
Web URLhttp://pubs.acs.org/doi/abs/10.1021/jp307203f
LanguageEnglish

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