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Towards traceability in scatterometric-optical dimensional metrology for optical lithography

Bodermann, Bernd (Physikalisch-Technische Bundesanstalt, Bundesallee 100, D-38116, Braunschweig, Germany), Endres, Johannes (Physikalisch-Technische Bundesanstalt, Bundesallee 100, D-38116, Braunschweig, Germany), Groß, Hermann (Physikalisch-Technische Bundesanstalt, Bundesallee 100, D-38116, Braunschweig, Germany), Henn, Mark-Alexander (Physikalisch-Technische Bundesanstalt, Bundesallee 100, D-38116, Braunschweig, Germany), Kato, Akiko (Physikalisch-Technische Bundesanstalt, Bundesallee 100, D-38116, Braunschweig, Germany), Scholze, Frank (Physikalisch-Technische Bundesanstalt, Bundesallee 100, D-38116, Braunschweig, Germany) and Wurm, Matthias (Physikalisch-Technische Bundesanstalt, Bundesallee 100, D-38116, Braunschweig, Germany)
Document typeProceeding
Journal title / SourceDGaO-Proceedings
Publication date 2015
Conference name113th annual meeting of the DGaO
Conference date29 May - 1 June 2012
Conference placeEindhoven, The Netherlands
ISSN1614-8436
Web URLhttp://www.dgao-proceedings.de
LanguageEnglish

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