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Traceable Quasi-dynamic Stroboscopic Scanning White Light Interferometry

Heikkinen, V (Centre for Metrology and Accreditation (MIKES), Espoo, Finland), Nolvi, A (University of Helsinki, Helsinki, Finland), Paulin, T (Centre for Metrology and Accreditation (MIKES), Espoo, Finland), Seppä, J (Centre for Metrology and Accreditation (MIKES), Espoo, Finland), Kassamakov, I (University of Helsinki, Helsinki, Finland), Lassila, A (Centre for Metrology and Accreditation (MIKES), Espoo, Finland) and Hæggström, E (University of Helsinki, Helsinki, Finland)
Keywords:

SSWL (Stroboscopic Scanning White Light Interferometry), Metrology Transfer standards

Document typeProceeding
Journal title / SourceFringe 2013
Peer-reviewed articleYes
Page numbers / Article number491 - 496
Publisher's nameSpringer Berlin Heidelberg
Publisher's address (city only)Berlin
Publication date 2014-01-1
Conference name7th International Workshop on Advanced Optical Imaging and Metrology
Conference date01-01-2014
Conference placeNurtingen, Germany
DOI10.1007/978-3-642-36359-7_86
ISBN9783642363597
Web URLhttp://link.springer.com/book/10.1007/978-3-642-36359-7
LanguageEnglish

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