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In-situ characterisation of the probing force of contact stylus profilers using a micromachined nanoforce actuator

Li, ZL (Physikalisch-Technische Bundesanstalt, Braunschweig, Germany.), Ahbe, TA (Physikalisch-Technische Bundesanstalt, Braunschweig, Germany.), Gao, SG (Physikalisch-Technische Bundesanstalt, Braunschweig, Germany.) and Brand, UB (Physikalisch-Technische Bundesanstalt, Braunschweig, Germany.)
Document typeProceeding
Journal title / SourceProceedings of the 12th euspen International Conference
Peer-reviewed articleYes
IssueInternational Conference European Society for Precision Engineering and Nanotechnology 12th
Page numbers / Article number179-182
Publisher's nameEuspen conference proceedings 
Publisher's address (city only)Leuven, Belgium
Publication date 2012-06
Conference name12th International Conference European Society for Precision Engineering and Nanotechnology
Conference date04-06-2012 to 08-06-2012
Conference placeNacka Strandsmässan, Stockholm, Sweden
Web URLhttp://training.euspen.eu/content/News-and-events/euspen-events/Stockholm%202012/proceedings/VolumePro1/VolumePro1/HTML/files/assets/basic-html/page179.html

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