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Développement d’un instrument virtuel pour améliorer l’estimation de l’incertitude de mesure du microscope à force atomique métrologique du LNE

Ceria, P. (LNE), Ducourtieux, S. (LNE) and Boukellal, Y. (LNE)

metrological atomic force microscopy, virtual instrument, modelling, Monte Carlo method, measurement uncertainty

Document typeProceeding
Journal title / SourceProceedings of Forum des microscopies à sonde locale
Page numbers / Article numberp 11-12
Publication date 2015
Conference nameForum des microscopies à sonde locale
Conference dateMarch 16-20, 2015
Conference placeRouilly-Sacey, France
Web URLhttp://www.sondeslocales.fr/livret2015

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