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Characterization of ZnO structures by optical and X-ray methods

Petrik, PP (Fraunhofer Institute for Integrated Systems and Device Technology, Institute for Technical Physics and Materials Science (MFA)), Pollakowski, BP (Physikalisch-Technische Bundesanstalt (PTB)), Zakel, SZ (Physikalisch-Technische Bundesanstalt (PTB)), Gumprecht, TG (Fraunhofer Institute for Integrated Systems and Device Technology, Erlangen Graduate School in Advanced Optical Technologies (SAOT)), Beckhoff, BB (Physikalisch-Technische Bundesanstalt (PTB)), Lemberger, ML (Fraunhofer Institute for Integrated Systems and Device Technology), Labadi, ZL (Institute for Technical Physics and Materials Science (MFA)), Baji, ZB (Institute for Technical Physics and Materials Science (MFA)), Jank, MJ (Fraunhofer Institute for Integrated Systems and Device Technology) and Nutsch, AN (Physikalisch-Technische Bundesanstalt (PTB))

Keywords:

Zinc oxide, Spectroscopic ellipsometry, X-ray fluorescence, Raman spectrometry, VUV reflectometry, Atomic layer deposition, Sputtering


Document type	Article
Journal title / Source	Applied Surface Science
Peer-reviewed article	Yes
Volume	281
Page numbers / Article number	123-128
Publisher's name	Elsevier
Publisher's address (city only)	Philadelphia
Publication date	2013-09-15
ISSN	0169-4332
DOI	10.1016/j.apsusc.2012.12.035
Web URL	http://www.sciencedirect.com/science/article/pii/S0169433212021861
Language	English

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