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Quasidynamic calibration of stroboscopic scanning white light interferometer with a transfer standard

Seppa, J (VTT), Kassamakov, I (University of Helsinki), Heikkenen, V (VTT), Nolvi, A (University of Helsinki), Paulin, T (University of Helsinki), Lassila, A (VTT) and Haeggstrom, E (University of Helsinki)
Keywords:

Micro(nano)electromechanical systems, Scanning white light interferometry, stroboscopic scanning white light interferometry, traceability

Document typeArticle
Journal title / SourceOptical Engineering
Peer-reviewed articleYes
Volume51
Issue12
Page numbers / Article number124104
Publisher's nameSPIE
Publisher's address (city only)not known
Publication date 2013-12-20
ISSNN/A
DOI10.1117/1.OE.52.12.124104
Web URLhttp://opticalengineering.spiedigitallibrary.org/article.aspx?articleid=1790550
LanguageEnglish

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