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The EURAMET Repository Link is an online service providing links to scientific papers published within the European Metrology Research Programme (EMRP), the European Metrology Programme for Innovation and Research (EMPIR) and projects funded by iMERA-Plus.

Quasidynamic calibration of stroboscopic scanning white light interferometer with a transfer standard

Seppa, J (VTT), Kassamakov, I (University of Helsinki), Heikkenen, V (VTT), Nolvi, A (University of Helsinki), Paulin, T (University of Helsinki), Lassila, A (VTT) and Haeggstrom, E (University of Helsinki)

Micro(nano)electromechanical systems, Scanning white light interferometry, stroboscopic scanning white light interferometry, traceability

Document typeArticle
Journal title / SourceOptical Engineering
Peer-reviewed articleYes
Page numbers / Article number124104
Publisher's nameSPIE
Publisher's address (city only)not known
Publication date 2013-12-20
Web URLhttp://opticalengineering.spiedigitallibrary.org/article.aspx?articleid=1790550

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