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Calibration and correction of a 6 degree of freedom piezo driven stage

Küng, A. (Federal Institute of Metrology (METAS), Switzerland), Nicolet, A. (Federal Institute of Metrology (METAS), Switzerland) and Meli, F. (Federal Institute of Metrology (METAS), Switzerland)
Keywords:

6 degrees of freedom stage, calibration, parallel cinematics, nano-positioning, multi-axis correction model

Document typeProceeding
Journal title / SourceProceedings of the 16th international conference of the european society for precision engineering and nanotechnology (euspen)
Peer-reviewed articleYes
Volume1
IssueP1.59
Page numbers / Article number2
Publisher's nameeuspen
Publisher's address (city only)Bedford
Publication date 2016-05-30
Conference name16th international conference of the european society for precision engineering and nanotechnology (euspen)
Conference dateMay 30th – 3rd June 2016
Conference placeNottingham, UK
ISBN978-0-9566790-8-6
Web URLhttp://www.euspen.eu/Library/ProceedingsPresentations.aspx
LanguageEnglish

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