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Aperture alignment in autocollimator-based deflectometric profilometers

Geckeler, R. D. (PTB), Artemiev, N. A. (ALS), Barber, S. K. (ALS), Just, A (PTB), Lacey, I. (ALS), Kranz, O (PTB), Smith, B. V. (Lawrance Berkeley) and Yaschckuk, V. V. (ALS)
Keywords:

Apertures, Calibration Charge coupled devices, Ray tracing, Optical aberrations

Document typeArticle
Journal title / SourceREVIEW OF SCIENTIFIC INSTRUMENTS
Peer-reviewed articleYes
Volume87
Issue051906 (2016)
Page numbers / Article number1-9
Publisher's nameAmerican Institute of Physics
Publisher's address (city only)Melville, NY 11747-4300 USA
Publication date 2016-05-24
ISSNPrint: 0034-6748, Online: 1089-7623
DOI10.1063/1.4950734
Web URLhttp://aip.scitation.org/doi/10.1063/1.4950734
LanguageEnglish

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