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Development of a virtual instrument to improve the estimation of measurement uncertainty of a metrological atomic force microscope using Monte Carlo method

Ceria, P. (LNE), Ducourtieux, S. (LNE) and Boukellal, Y. (LNE)

metrological atomic force microscopy, virtual instrument, modelling, Monte Carlo method, measurement uncertainty

Document typeProceeding
Journal title / SourceProceedings of euspen’s 15 th International Conference & Exhibition, Leuven, Belgium, June 2015
Page numbers / Article numberO3.3, p 107
Publisher's nameEuspen
Publisher's address (city only)Delft
Publication date 2015-06
Conference nameeuspen’s 15 th International Conference & Exhibition
Conference dateJune 1-5, 2015
Conference placeLeuven, Belgium

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