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Development of a virtual instrument to improve the estimation of measurement uncertainty of a metrological atomic force microscope using Monte Carlo method

Ceria, P. (LNE), Ducourtieux, S. (LNE) and Boukellal, Y. (LNE)
Keywords:

metrological atomic force microscopy, virtual instrument, modelling, Monte Carlo method, measurement uncertainty

Document typeProceeding
Journal title / SourceProceedings of euspen’s 15 th International Conference & Exhibition, Leuven, Belgium, June 2015
Issue2015
Page numbers / Article numberO3.3, p 107
Publisher's nameEuspen
Publisher's address (city only)Delft
Publication date 2015-06
Conference nameeuspen’s 15 th International Conference & Exhibition
Conference dateJune 1-5, 2015
Conference placeLeuven, Belgium
ISBN978-0-9566790-7-9
LanguageEnglish

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