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MEMS-based voltage detector

Helistö, P (VTT Technical Research Centre of Finland), Seppä, H (VTT Technical Research Centre of Finland) and Manninen, A (VTT Technical Research Centre of Finland)
Keywords:

Capacitive sensors; MEMS; Readout; Pull-in; Noise; Voltage measurement

Document typeArticle
Journal title / SourceSensors and Actuators A: Physical
Peer-reviewed articleYes
Volume234
Issuen/a
Page numbers / Article number99-103
Publisher's nameElsevier
Publisher's address (city only)Amsterdam
Publication date 2015-08-24
ISSNn/a
DOI10.1016/j.sna.2015.08.011
Web URLhttps://www.researchgate.net/publication/282373168_MEMS-based_voltage_detector
LanguageEnglish

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