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The EURAMET Repository Link is an online service providing links to scientific papers published within the European Metrology Research Programme (EMRP), the European Metrology Programme for Innovation and Research (EMPIR) and projects funded by iMERA-Plus.

High precision tilt stage as a key element to a universal test mirror for characterization and calibration of slope measuring instruments

Yashchuk, VV (ALS), Artemiev, NA (KLA-Tencor Corp), Centers, G (ALS), Chaubard, A (ENSICAEN), Geckeler, RD (PTB), Lacey, I (ALS), Marth, H (PI), McKinney, WR (Diablo Valley College), Noll, T (HZB), Siewert, F (HZB), Winter, M (PI) and Zeschke, T (HZB)
Keywords:

Calibration, Mirrors, X-ray optics, Apertures, Comparators

Document typeArticle
Journal title / SourceREVIEW OF SCIENTIFIC INSTRUMENTS
Peer-reviewed articleYes
Volume87
Issue051904 (2016)
Page numbers / Article number1-12
Publisher's nameAmerican Institute of Physics
Publisher's address (city only)Melville, NY 11747-4300 USA
Publication date 2016-05-20
ISSNPrint: 0034-6748, Online: 1089-7623
DOI10.1063/1.4950729
Web URLhttp://aip.scitation.org/doi/10.1063/1.4950729
LanguageEnglish

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