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The EURAMET Repository Link is an online service providing links to scientific papers published within the European Metrology Research Programme (EMRP), the European Metrology Programme for Innovation and Research (EMPIR) and projects funded by iMERA-Plus.

An active reference spring array for in-situ calibration of the normal spring constant of AFM cantilevers

Gao, S. (PTB), Brand, U. (PTB), Hahn, S. (TU Chemnitz) and Hiller, K. (TU Chemnitz)

Calibration ; Microelectromechanical systems ; Reactive ion etching ; Simulations ; Fabrication

Document typeProceeding
Journal title / SourceProc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 951719 (May 21, 2015); doi:10.1117/12.2178850; http://dx.doi.org/10.1117/12.2178850
VolumeProc. SPIE 9517
IssueProc. SPIE 9517
Page numbers / Article number951719
Publisher's nameSPIE
Publication date 2015-05-21
Conference nameSmart Sensors, Actuators, and MEMS VII and Cyber Physical Systems
Conference date2015-May-04
Conference placeBarcelona, Spain

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