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An active reference spring array for in-situ calibration of the normal spring constant of AFM cantilevers

Gao, S. (PTB), Brand, U. (PTB), Hahn, S. (TU Chemnitz) and Hiller, K. (TU Chemnitz)
Keywords:

Calibration ; Microelectromechanical systems ; Reactive ion etching ; Simulations ; Fabrication

Document typeProceeding
Journal title / SourceProc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 951719 (May 21, 2015); doi:10.1117/12.2178850; http://dx.doi.org/10.1117/12.2178850
VolumeProc. SPIE 9517
IssueProc. SPIE 9517
Page numbers / Article number951719
Publisher's nameSPIE
Publication date 2015-05-21
Conference nameSmart Sensors, Actuators, and MEMS VII and Cyber Physical Systems
Conference date2015-May-04
Conference placeBarcelona, Spain
DOI10.1117/12.2178850
LanguageEnglish

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