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Measurement comparison of goniometric scatterometry and coherent Fourier scatterometry

Endres, J. (Physikalisch-Technische Bundesanstalt, Braunschweig & Berlin, Bundesallee 100, D-38116, Braunschweig, Germany), Kumar, N. (Technische Univ. Delft, Van der Waalsweg 8, 2628CH Delft, The Netherlands), Petrik, P. (Technische Univ. Delft, Van der Waalsweg 8, 2628CH Delft, The Netherlands), Henn, M.-A. (Physikalisch-Technische Bundesanstalt, Braunschweig & Berlin, Bundesallee 100, D-38116, Braunschweig, Germany), Heidenreich, S. (Physikalisch-Technische Bundesanstalt, Braunschweig & Berlin, Bundesallee 100, D-38116, Braunschweig, Germany), Pereira, S. F. (Technische Univ. Delft, Van der Waalsweg 8, 2628CH Delft, The Netherlands), Urbach, H. P. (Technische Univ. Delft, Van der Waalsweg 8, 2628CH Delft, The Netherlands) and Bodermann, B. (Physikalisch-Technische Bundesanstalt Braunschweig and Berlin, Bundesallee 100, D- 38116, Braunschweig, Germany)
Keywords:

Scatterometry, CD, pitch, inverse diffraction problem

Document typeProceeding
Journal title / SourceProc SPIE
Volume9132
Publication date 2015
Conference nameSPIE Optical Micro- and Nanometrology V
Conference dateApril 14, 2014
Conference placeBrussels, Belgium
DOI10.1117/12.2052819
LanguageEnglish

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