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Ion beam figuring machine for ultra-precision silicon spheres correction

Arnold, Th. (Leibniz-Institut für Oberflächenmodifizierung) and Pietag, F. (Leibniz-Institut für Oberflächenmodifizierung)
Keywords:

Ion beam figuring Form error correction Silicon sphere Avogadro project

Document typeArticle
Journal title / SourcePrecision Engineering
Peer-reviewed articleYes
Volume41
Issue1
Page numbers / Article number119
Publisher's nameElsevier
Publisher's address (city only)Philadelphia
Publication date 2015-03-31
ISSN0141-6359
DOI10.1016/j.precisioneng.2015.03.009
LanguageEnglish

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