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Optical characterization of laterally and vertically structured oxides and semiconductors

Petrik, P. (Department of Imaging Science and Technology, Faculty of Applied Sciences, Delft University of Technology, P. O. Box 5046, 2600GA Delft, The Netherlands; Research Centre for Natural Sciences, Institute for Technical Physics and Materials Science, Hungari), Kumar, N. (Department of Imaging Science and Technology, Faculty of Applied Sciences, Delft University of Technology, P. O. Box 5046, 2600GA Delft, The Netherlands), Agocs, E. (Research Centre for Natural Sciences, Institute for Technical Physics and Materials Science, Hungarian Academy of Sciences, H-1121 Budapest, Konkoly Thege Miklos ut 29-33, Hungary), Fodor, B. (Research Centre for Natural Sciences, Institute for Technical Physics and Materials Science, Hungarian Academy of Sciences, H-1121 Budapest, Konkoly Thege Miklos ut 29-33, Hungary; Faculty of Science, University of Pecs, 7624 Pecs, Ifjusag utja 6, Hungary), Pereira, S. F. (Department of Imaging Science and Technology, Faculty of Applied Sciences, Delft University of Technology, P. O. Box 5046, 2600GA Delft, The Netherlands), Lohner, T. (Research Centre for Natural Sciences, Institute for Technical Physics and Materials Science, Hungarian Academy of Sciences, H-1121 Budapest, Konkoly Thege Miklos ut 29-33, Hungary), Fried, M. (Research Centre for Natural Sciences, Institute for Technical Physics and Materials Science, Hungarian Academy of Sciences, H-1121 Budapest, Konkoly Thege Miklos ut 29-33, Hungary; Doctoral School of Molecular- and Nanotechnologies ... Hungary) and Urbach, H. P. (Department of Imaging Science and Technology, Faculty of Applied Sciences, Delft University of Technology, P. O. Box 5046, 2600GA Delft, The Netherlands)
Keywords:

ZnO, Ellipsometry, Scatterometry, Material Structure

Document typeProceeding
Journal title / SourceProc. of SPIE
VolumeVol. 8987
Publication date 2015
DOI10.1117/12.2042181
Web URLhttp://spiedigitallibrary.org/
LanguageEnglish

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