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A maximum likelihood approach to the inverse problem of scatterometry

Henn, M.-A. (Physikalisch-Technische Bundesanstalt, Braunschweig & Berlin, Bundesallee 100, D-38116, Braunschweig, Germany), Gross, H. (Physikalisch-Technische Bundesanstalt, Braunschweig & Berlin, Bundesallee 100, D-38116, Braunschweig, Germany), Scholze, F. (Physikalisch-Technische Bundesanstalt, Braunschweig & Berlin, Bundesallee 100, D-38116, Braunschweig, Germany), Wurm, M. (Physikalisch-Technische Bundesanstalt, Braunschweig & Berlin, Bundesallee 100, D-38116, Braunschweig, Germany), Elster, C. (Physikalisch-Technische Bundesanstalt, Braunschweig & Berlin, Bundesallee 100, D-38116, Braunschweig, Germany) and Baer, M. (Physikalisch-Technische Bundesanstalt Braunschweig and Berlin, Bundesallee 100, D- 38116, Braunschweig, Germany)
Keywords:

Diffraction gratings, Metrology

Document typeArticle
Journal title / SourceOPTICS EXPRESS
Peer-reviewed articleYes
Volume20
Issue12
Page numbers / Article number12771 - 12786
Publication date 2012-05-23
DOI10.1364/OE.20.012771
Web URLhttps://www.osapublishing.org/oe/abstract.cfm?uri=oe-20-12-12771
LanguageEnglish

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