Traceable methods for vertical scale characterization of dynamic stroboscopic scanning white-light interferometer measurements
Heikkinen, V (VTT Technical Research Centre, Espoo, Finland), Kassmakov, I (University of Helsinki, Helsinki, Finland), Seppä, J (VTT Technical Research Centre, Espoo, Finland), Paulin, T (University of Helsinki, Helsinki, Finland), Nolvi, A (University of Helsinki, Helsinki, Finland), Lassila, A (VTT Technical Research Centre, Espoo, Finland) and Hæggström, E (University of Helsinki, Helsinki, Finland)Stroboscopic scanning white-light interferometry (SSWLI),3D imaging of oscillating samples,Traceability of the vertical displacement measurement, metrology, uncertainties
| Document type | Article |
| Journal title / Source | Applied Optics |
| Peer-reviewed article | Yes |
| Volume | 54 |
| Issue | 35 |
| Page numbers / Article number | 10397-10403 |
| Publisher's name | OSA Publishing |
| Publisher's address (city only) | Washington, D.C. |
| Publication date | 2015-12-9 |
| ISSN | n/a |
| DOI | 10.1364/AO.54.010397 |
| Web URL | https://www.osapublishing.org/ao/abstract.cfm?uri=ao-54-35-10397 |
| Language | English |