The statistical inverse problem of scatterometry: Bayesian inference and the effect of different priors
Heidenreich, S (PTB), Gross, H (PTB), Wurm, M (PTB), Bodermann, B (PTB) and Bär, M (PTB)Uncertainty quantification, Diffraction gratings, Hybrid metrology
| Document type | Proceeding |
| Journal title / Source | Proc. SPIE 9526, Modeling Aspects in Optical Metrology V, 95260U (June 21, 2015) |
| Peer-reviewed article | Yes |
| Volume | 9526 |
| Issue | Modeling Aspects in Optical Metrology V |
| Page numbers / Article number | - |
| Publisher's name | Society of Photo-Optical Instrumentation Engineers (SPIE) |
| Publisher's address (city only) | Munich |
| Publication date | 2015-06-21 |
| Conference name | SPIE Modeling Aspects in Optical Metrology V |
| Conference date | 21-06-2015 |
| Conference place | Munich |
| ISSN | - |
| DOI | 10.1117/12.2185707 |
| ISBN | - |
| Web URL | http://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2344591 |
| Language | English |