The statistical inverse problem of scatterometry: Bayesian inference and the effect of different priors
Heidenreich, S (PTB), Gross, H (PTB), Wurm, M (PTB), Bodermann, B (PTB) and Bär, M (PTB)Uncertainty quantification, Diffraction gratings, Hybrid metrology
Document type | Proceeding |
Journal title / Source | Proc. SPIE 9526, Modeling Aspects in Optical Metrology V, 95260U (June 21, 2015) |
Peer-reviewed article | Yes |
Volume | 9526 |
Issue | Modeling Aspects in Optical Metrology V |
Page numbers / Article number | - |
Publisher's name | Society of Photo-Optical Instrumentation Engineers (SPIE) |
Publisher's address (city only) | Munich |
Publication date | 2015-06-21 |
Conference name | SPIE Modeling Aspects in Optical Metrology V |
Conference date | 21-06-2015 |
Conference place | Munich |
ISSN | - |
DOI | 10.1117/12.2185707 |
ISBN | - |
Web URL | http://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2344591 |
Language | English |