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Methods for determining piezoelectric properties of thin epitaxial films: Theoretical foundations

McCartney, LNM (National Physical Laboratory, Teddington, Middlesex TW11 0LW, United Kingdom), Wright, LW (National Physical Laboratory, Teddington, Middlesex TW11 0LW, United Kingdom), Cain, MGC (National Physical Laboratory, Teddington, Middlesex TW11 0LW, United Kingdom), Crain, JC (National Physical Laboratory, Teddington, Middlesex TW11 0LW, United Kingdom, School of Physics and Astronomy, The University of Edinburgh, Edinburgh EH9 3JZ, United Kingdom), Martyna, GJM (IBM Research Division, T. J. Watson Research Centre, 1101 Kitchawan Road, Yorktown Heights, New York 10598, USA) and Newns, DMN (IBM Research Division, T. J. Watson Research Centre, 1101 Kitchawan Road, Yorktown Heights, New York 10598, USA)
Keywords:

Piezoelectric films, Elasticity,Electrodes, Electric measurements, Piezoelectric fields

Document typeArticle
Journal title / SourceJournal Applied Physics
Peer-reviewed articleYes
Volume116
Page numbers / Article number14104
Publisher's nameAmerican Institute of Physics (AIP)
Publication date 2014
ISSN0021-8979
DOI10.1063/1.4885058
Web URLhttp://scitation.aip.org/content/aip/journal/jap/116/1/10.1063/1.4885058
LanguageEnglish

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