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Towards Quantitative Characterisation of the Small Force Transducer Used in Nanoindentation Instrument

Li, ZL (Physikalisch-Technische Bundesanstalt, Braunschweig, Germany.) and Brand, UB (Physikalisch-Technische Bundesanstalt, Braunschweig, Germany.)
Keywords:

Nanometrology, Nanoindentation Instrument, Nano-Force Transducer, Microelectromechanical Systems, Nano-Force Calibration

Document typeArticle
Journal title / SourceModern Instrumentation
Peer-reviewed articleYes
Volume2
Issue4
Page numbers / Article number61-67
Publisher's nameScientific Research
Publisher's address (city only)Wuhan, China
Publication date 2013-10
ISSN2165-9257
DOI10.4236/mi.2013.24009
Web URLhttp://file.scirp.org/pdf/MI_2013093011192540.pdf
LanguageEnglish

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