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Thickness and Microdomain Orientation of Asymmetric PS‑b‑PMMA Block Copolymer Films Inside Periodic Gratings

Lupi, F. (Laboratorio MDM, IMM-CNR), Aprile, G. (INRIM), Giammaria, T. (Laboratorio MDM, IMM-CNR), Seguini, G. (Laboratorio MDM, IMM-CNR), Zuccheri, G. (INSTM), De Leo, N. (INRIM), Boarino, L. (INRIM) and Perego, M. (Università Piemonte)
Keywords:

PS-b-PMMA, self-assembly, trench, thin film, rapid thermal annealing, graphoepitaxy

Document typeArticle
Journal title / SourceApplied Materials and Interfaces
Peer-reviewed articleYes
Volume7
Issue42
Page numbers / Article number23615-23622
Publisher's nameACS Publications
Publisher's address (city only)Washington
Publication date 2015-10-6
DOI10.1021/acsami.5b07127
LanguageEnglish

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