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Electron Flood Gun Damage Effects in 3D Secondary Ion Mass Spectrometry Imaging of Organics

Havelund, R. (National Physical Laboratory, Teddington, TW11 0LW, United Kingdom), Seah, M.P. (National Physical Laboratory, Teddington, TW11 0LW, United Kingdom), Shard, A.G. (National Physical Laboratory, Teddington, TW11 0LW, United Kingdom) and Gilmore, I.S. (National Physical Laboratory, Teddington, TW11 0LW, United Kingdom)
Keywords:

Secondary ion mass spectrometry; depth profiling; argon cluster; damage; chemical metrology

Document typeArticle
Journal title / SourceJournal of the American Society of Mass Spectrometry
Peer-reviewed articleYes
Volume25
Issue9
Page numbers / Article number1565-1571
Publisher's nameASMS
Publisher's address (city only)Santa Fe USA
Publication date 2014-09-25
DOI10.1007/s13361-014-0929-5
Web URLhttp://link.springer.com/article/10.1007%2Fs13361-014-0929-5#page-2
LanguageEnglish

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