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BAYESIAN APPROACH TO THE STATISTICAL INVERSE PROBLEM OF SCATTEROMETRY: COMPARISON OF THREE SURROGATE MODELS

Heidenreich, S. (PTB), Gross, H. (PTB) and Bär, M. (PTB)
Keywords:

scatterometry, Bayesian inference, stochastic partial differential equations, collocation, inverse problem

Document typeArticle
Journal title / SourceInternational Journal for Uncertainty Quantification
Peer-reviewed articleYes
Volume5
Issue6
Page numbers / Article number511–526
Publisher's nameBegell House
Publisher's address (city only)Danbury
Publication date 2015-09-1
ISSN-
DOI10.1615/Int.J.UncertaintyQuantification.2015013050
Web URL-
LanguageEnglish

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