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IMPROVEMENT IN LONG TERM STABILITY OF THE LONG RANGE AFMS

Vorbringer-Dorozhovets, N. (TU Ilmenau) and Manske, E. (TU Ilmenau)
Keywords:

AFM, long range AFM, nanopositioning and nanomeasuring machine, NPM machine, long distance measurements

Document typeProceeding
Journal title / SourceXXI IMEKO World Congress - Full Papers
Issue1
Page numbers / Article number2279
Publisher's nameCzech Technical University
Publisher's address (city only)Prague
Publication date 2015
Conference nameXXI IMEKO World Congress
Conference dateAugust 30 - September 4, 2015
Conference placePrague
ISBN978-80-01-05793-3
LanguageEnglish

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