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Novel super-fast three-dimensional SEM image simulation

Cizmar, PC (Physikalisch-Technische Bundesanstalt, Bundesallee 100, 38116 Braunschweig, Germany), Frase, CGF (Physikalisch-Technische Bundesanstalt, Bundesallee 100, 38116 Braunschweig, Germany) and Bosse, HB (Physikalisch-Technische Bundesanstalt, Bundesallee 100, 38116 Braunschweig, Germany)
Document typeArticle
Journal title / SourceMicroscopy and Microanalysis
Peer-reviewed articleYes
Volume19
IssueSupplement S2
Page numbers / Article number796-797
Publisher's nameCambridge University Press (CUP)
Publisher's address (city only)Cambridge
Publication date 2013-08
ISSN1431-9276
DOI10.1017/S1431927613005977
Web URLhttp://journals.cambridge.org/action/displayAbstract?fromPage=online&aid=9032233
LanguageEnglish

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