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The EURAMET Repository Link is an online service providing links to scientific papers published within the European Metrology Research Programme (EMRP), the European Metrology Programme for Innovation and Research (EMPIR) and projects funded by iMERA-Plus.

Interferometer-based scanning probe microscope for high-speed, long-range, traceable measurements

Vorbringer-Dorozhovets, N. (TU Ilmenau), Manske, E. (TU Ilmenau) and Jäger, G. (TU Ilmenau)

nanopositioning and nanomeasuring machine, metrological scanning probe microscope, SPM, AFM

Document typeArticle
Journal title / SourcePAK
Issue02 (2014)
Page numbers / Article number069-072
Publisher's namePAK
Publisher's address (city only)Gliwice
Publication date 2014
Web URLhttp://pak.info.pl/index.php?menu=artykulSzczegol&idArtykul=3967

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