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Interferometer-based scanning probe microscope for high-speed, long-range, traceable measurements

Vorbringer-Dorozhovets, N. (TU Ilmenau), Manske, E. (TU Ilmenau) and Jäger, G. (TU Ilmenau)
Keywords:

nanopositioning and nanomeasuring machine, metrological scanning probe microscope, SPM, AFM

Document typeArticle
Journal title / SourcePAK
Volume60
Issue02 (2014)
Page numbers / Article number069-072
Publisher's namePAK
Publisher's address (city only)Gliwice
Publication date 2014
Web URLhttp://pak.info.pl/index.php?menu=artykulSzczegol&idArtykul=3967
LanguageEnglish

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