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Wave front and phase correction for double-ended gauge block interferometry

Lassila, A. (VTT Technical Research Centre of Finland Ltd, Centre for Metrology (MIKES)) and Byman, V. (VTT Technical Research Centre of Finland Ltd, Centre for Metrology (MIKES))
Keywords:

gauge block, interferometer, phase stepping, wavefront error, phase correction, surface roughness, length

Document typeArticle
Journal title / SourceMetrologia
Peer-reviewed articleYes
Volume52
Issue5
Page numbers / Article number708–716
Publisher's nameIOP Publishing, Bureau International des Poids et Mesures
Publisher's address (city only)Bristol
Publication date 2015-09-24
ISSN0026-1394
DOI10.1088/0026-1394/52/5/708
Web URLhttp://iopscience.iop.org/article/10.1088/0026-1394/52/5/708/pdf
LanguageEnglish

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