Sub-kHz traceable characterization of stroboscopic scanning white light interferometer
Heikkinen, V (Centre for Metrology and Accreditation (MIKES), Espoo, Finland), Kassamakov, I (University of Helsinki, Helsinki, Finland), Paulin, T (Centre for Metrology and Accreditation (MIKES), Espoo, Finland), Nolvi, A (University of Helsinki, Helsinki, Finland), Seppä, J (Centre for Metrology and Accreditation (MIKES), Espoo, Finland), Lassila, A (Centre for Metrology and Accreditation (MIKES), Espoo, Finland) and Hæggström, E (University of Helsinki, Helsinki, Finland)Scanning white light interferometry (SWLI), metrology, MEMs, NEMs,
| Document type | Article |
| Journal title / Source | SPIE proceedings |
| Peer-reviewed article | Yes |
| Volume | 9132 |
| Issue | 1 |
| Page numbers / Article number | 913218 |
| Publisher's name | SPIE |
| Publisher's address (city only) | Bellingham |
| Publication date | 2014-05-1 |
| DOI | 10.1117/12.2051622 |
| Web URL | http://spie.org/Publications/Proceedings/Paper/10.1117/12.2051622 |
| Language | English |