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Sub-kHz traceable characterization of stroboscopic scanning white light interferometer

Heikkinen, V (Centre for Metrology and Accreditation (MIKES), Espoo, Finland), Kassamakov, I (University of Helsinki, Helsinki, Finland), Paulin, T (Centre for Metrology and Accreditation (MIKES), Espoo, Finland), Nolvi, A (University of Helsinki, Helsinki, Finland), Seppä, J (Centre for Metrology and Accreditation (MIKES), Espoo, Finland), Lassila, A (Centre for Metrology and Accreditation (MIKES), Espoo, Finland) and Hæggström, E (University of Helsinki, Helsinki, Finland)
Keywords:

Scanning white light interferometry (SWLI), metrology, MEMs, NEMs,

Document typeArticle
Journal title / SourceSPIE proceedings
Peer-reviewed articleYes
Volume9132
Issue1
Page numbers / Article number913218
Publisher's nameSPIE
Publisher's address (city only)Bellingham
Publication date 2014-05-1
DOI10.1117/12.2051622
Web URLhttp://spie.org/Publications/Proceedings/Paper/10.1117/12.2051622
LanguageEnglish

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