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A surrogate model enables a Bayesian approach to the inverse problem of scatterometry

Heidenreich, S (PTB), Gross, H (PTB), Henn, M-A (PTB), Elster, C (PTB) and Bär, M (PTB)
Keywords:

scatterometry, photomask geometry, surrogate model, polynomial chaos

Document typeArticle
Journal title / SourceJournal of Physics: Conference Series
Peer-reviewed articleYes
Volume490
Issue-
Page numbers / Article number012007
Publisher's nameIOPScience
Publisher's address (city only)Bristol & Philadelphia
Publication date 2014-03-11
ISSN-
DOI10.1088/1742-6596/490/1/012007
Web URLhttp://iopscience.iop.org/article/10.1088/1742-6596/490/1/012007/pdf
LanguageEnglish

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