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Scatterometric characterization of diffractive optical elements

Saastamoinen, Toni (Univeristy of Eastern Finland), Husu, Hannu (Center for Metrology and Accreditation), Laukkanen, Janne (Univeristy of Eastern Finland), Siitonen, Samuli (Univeristy of Eastern Finland), Turunen, Jari (Univeristy of Eastern Finland) and Lassila, Antti (Center for Metrology and Accreditation)
Keywords:

scatterometry, diffractive optical elements

Document typeProceeding
Journal title / SourceProceedings of SPIE
Peer-reviewed articleYes
Volume9173
Issue-
Page numbers / Article number91730I
Publisher's nameSPIE
Publisher's address (city only)Bellingham
Publication date 2015-09-10
Conference nameSPIE Optics+Photonics 2014
Conference date17-21 August, 2014
Conference placeSan Diego
ISSN0277-786X
DOI10.1117/12.2061699
ISBN9781628412000
Web URLhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=1901269
LanguageEnglish

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