Optical thin film metrology for optoelectronics
Petrik, PP (Fraunhofer Institute for Integrated Systems and Device Technology, Schottkystrasse 10, 91058 Erlangen, Germany, Institute for Technical Physics and Materials Science (MFA), Research Center for Natural Sciences, Konkoly Thege u. 29-33., 1121 Budapest, Hung)| Document type | Article |
| Journal title / Source | Journal of Physics : Conference series |
| Peer-reviewed article | Yes |
| Volume | 398 |
| Issue | 1 |
| Page numbers / Article number | 012002 |
| Publisher's name | IOP Publishing |
| Publisher's address (city only) | London |
| Publication date | 2012 |
| ISSN | 1742-6588 |
| DOI | 10.1088/1742-6596/398/1/012002 |
| Web URL | http://iopscience.iop.org/article/10.1088/1742-6596/398/1/012002/pdf |
| Language | English |