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Optical thin film metrology for optoelectronics

Petrik, PP (Fraunhofer Institute for Integrated Systems and Device Technology, Schottkystrasse 10, 91058 Erlangen, Germany, Institute for Technical Physics and Materials Science (MFA), Research Center for Natural Sciences, Konkoly Thege u. 29-33., 1121 Budapest, Hung)
Document typeArticle
Journal title / SourceJournal of Physics : Conference series
Peer-reviewed articleYes
Volume398
Issue1
Page numbers / Article number012002
Publisher's nameIOP Publishing
Publisher's address (city only)London
Publication date 2012
ISSN1742-6588
DOI10.1088/1742-6596/398/1/012002
Web URLhttp://iopscience.iop.org/article/10.1088/1742-6596/398/1/012002/pdf
LanguageEnglish

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