Dataset of the determination of the topographic spatial resolution of a confocal point sensor with a type ASG material measure
surface metrology, topographic spatial resolution, lateral period limit, type ASG material measure, Siemens star, confocal sensor, nano measuring machine
| Document type | Datasets |
| Journal title / Source | |
| Language | English |
| Persistent Identifier | https://zenodo.org/record/6364960 |