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Publication from EMPIR nanometrology project wins award in the field of precision measurement
The demand for smaller and higher-performance electronic devices in our everyday lives requires the development of increasingly smaller and more sophisticated nanoscale components.
Completed EMPIR project Traceable three-dimensional nanometrology (15SIB09, 3DNano) advanced new approaches for measuring the dimensions of nano-objects. It developed scanning probe microscopy-based approaches to measure objects in three dimensions, which can be traced reliably to reference measures. More accurate nano-measurement supports the development of new and higher-performance devices in fields as diverse as medicine, energy capture and storage, and space exploration, offering the potential for broad technological and societal impact.
Outstanding Paper award
A paper entitled Accurate tip characterization in critical dimension atomic force microscopy, written by the project consortium and describing part of the work of the EMPIR project has been awarded the Measurement Science and Technology Outstanding Paper Award 2020 in the field of Precision Measurement.
Project Coordinator Virpi Korpelainen from VTT said
‘I am very happy to see that the project results are recognised at a high level. It shows that these kinds of nano-metrology projects are needed. The instruments and methods developed in the project are already in use in participating NMIs and they were an important step toward traceable high accuracy measurements of complex nanostructures.’
This EMPIR project is co-funded by the European Union's Horizon 2020 research and innovation programme and the EMPIR Participating States.
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