Workshop on generation and handling of reactive gases

13 April 2021,10:00-14:05 hrs CEST

EMPIR project Metrology for Airborne Molecular Contaminants II (17IND09, MetAMCII) is working to develop new spectroscopic techniques and reference materials to measure priority airborne molecular contaminants (AMCs; including HCl and NH3) at lower concentrations (<1 nmol/mol) and faster rates (<1 minute), than is currently possible. By developing techniques for timely and reliable AMC detection, this project will enable semiconductor manufacturers to make corrective actions before production yields are affected.

The workshop

The workshop on generation and handling of reactive gases will feature a range of speakers from across research and industry.

Talks are planned covering subjects including:

  • Gas standards for reactive gases
  • Dynamic dilution methods
  • Sampling of reactive gases


Who should attend?

This workshop will be of interest to anyone from industry or academia involved in the generation and handling of reactive gases.

Full programme


Contact: Stefan Persijn VSL

This EMPIR project is co-funded by the European Union's Horizon 2020 research and innovation programme and the EMPIR Participating States.